Welcome to MEMS and Micromachining Laboratory!

Mitsuhiro Shikida

Staff

Mituhiro Shikida

画像の説明
 Dr. Eng., Associate Professor,
  Graduate School of Engineering, Nagoya University

ACADEMIC QUALIFICATIONS

  Doctor of Engineering, 1998, Nagoya University
  Master of Engineering, 1990, Seikei University
  Bachelor of Engineering, 1988, Seikei University

DISSERTATION

  "Study on electrostatic S-shaped film actuator"
  Mar. 3, 1998, Nagoya University

TEACHING AND RESEARCH INTERESTS

  • MEMS fabrication  • MEMS sensors and actuators  • Bio-medical applications of MEMS

PROFESSIONAL EXPERIENCE

  Associate Professor, 2006 to present
    Graduate School of Engineering, Nagoya University
  Associate Professor, 2004 - 2006
    EcoTopia Science Institute, Nagoya University
  Associate Professor, 2001 - 2004
    Research Center for Advanced Waste and Emission Management, Nagoya University
  Assistant Professor, 1995 - 2001
    Department of Micro System Engineering, Nagoya University
  Researcher, 1990 - 1995
    Hitachi, Ltd.