Welcome to MEMS and Micromachining Laboratory!

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Welcome Remarks

 Welcome to Website of MEMS and Micromachining Laboratory (Hata Group) in Department of Micro-Nano Systems Engineering, Graduate School of Engineering, Nagoya University!

 In this laboratory mainly we research on MEMS (microelectromechanical systems), microactuator, precision micro molds etc. and micro world from mechanical engineering and material science perspective. In addition, to develop new materials for using in MEMS we are concentrating on combinatorial techniques and carry out novel combinatorial deposition and evaluation methods vigorously. For more details please refer to Research topics or Publication.

What's new

  • Dr. Junpei Sakurai was appointed as Associate Professor. (7/1/2014)
  • Ms. Yumiko Hasebe was appointed as secretary. (7/1/2014)
  • Mr. Fukagawa received the outstanding poster presentation award in ICM&P2014. (6/12/2014)
  • Dr. Mitsuhiro Shikida was appointed as Processor at Hiroshima City University.

   For information about the past announcements, refer to Archives

Conferences, Lectures, Exhibitions

  • Conferences
      The 18th International Symposium on Laser Precision Microfabrication (LPM2017)
    • Cu micropatterning using femtosecond laser reduction of Cu2O nanoparticles, Yukinari Kondo, Mizue Mizoshiri, Junpei SakuraiSeiichi Hata, Toyama International Conference Center, Toyama, Japan (6/7/2017)&
    • Three-dimensional hot-film flow sensors fabricated using femtosecond laser reduction of CuO nanoparticles, Mizue Mizoshiri, Shun Arakane, Junpei SakuraiSeiichi Hata, Toyama International Conference Center, Toyama, Japan (6/7/2017)&
    • P- and n-type thermoelectric micropatterns fabricated by femtosecond laser reduction of CuO/NiO nanoparticles, Mizue Mizoshiri, Junpei SakuraiSeiichi Hata, Toyama International Conference Center, Toyama, Japan (6/8/2017)

      6th JSME/ASME 2017 International Conference on Materials and Processing, ICM&P2017
    • Copper-Based Micropatterning on Silicone Using a Combined Process of Spray-Coating and Femtosecond Laser Reduction of Copper Oxide Nanoparticles, Yasuaki Ito, Mizue Mizoshiri, Junpei SakuraiSeiichi Hata, University of Southern California, CA, USA (6/7/2017)

      APCOT2014
    • Micromachined Catheter Flow Sensor for Measurement of Breathing Characteristics in a Bronchial Region, Takayuki Yamada, Takuya Matsuyama, Miyoko Matsushima, Tsutomu Kawabe, Mitsuhiro Shikida,Daegu, Korea,(7/1/2014)
    • Penetration Capability of Pyramidal Shaped Micro-Needles Into Skin, K. Imaeda, K. Bessho, C. Miyake, M. Shikida,Daegu, Korea&br,(7/1/2014)

      ICM&P2014
    • THE EFFECT OF METAL BUFFER LAYERS ON OPEN-CIRCUIT VOLTAGE OF
      THIN-FILM THERMOELECTRIC MODULES, Mizue Mizoshiri,Shun Arakane,Takuya Maetani, Mitsuhiro ShikidaSeiichi Hata, Cobo Center, USA, (6/11/2014)
    • NEW FABRICATION METHOD OF MEMS THICK FILM MIRROR DEVICE OF CU-ZR-TI METALLIC GLASS, Shigetaka Watanabe, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata, Cobo Center, USA, (6/11/2014)
    • COMBINATORIAL SEARCH FOR MAGNETOSTRICTIVE MATERIAL WITH HIGH
      PERMEABILITY AND HIGH RESISTIVITY, Takuya Maetani,Yutaka Nakamitsu,Junpei Sakurai, Shigeki Nakagawa, Seiichi Hata, Cobo Center, USA, (6/11/2014)
    • Direct reduction of copper nanoparticles using femtosecond laser pulses for copper micropatterning, Shun Arakane,Mizue Mizoshiri,Takuya Maetani, Mitsuhiro ShikidaSeiichi Hata, Cobo Center, USA, (6/11/2014)
    • Moisture‐In‐Oil Sensor Using New Thin Film Metal Filter, Yusuke Yoshii, Yutaka Nakamitsu, Nobuyuki Mukai, Takashi Mizoguchi, Tsutomu Takahashi, Yuuki Fukagawa,Mizue Mizoshiri, Seiichi Hata, Cobo Center, USA, (6/11/2014)
    • High throughput evaluation of multi cell array for searching electrode materials of lithium-­ion battery, Masashi Miyamoto,Kazuyoshi, H., Yoshikazu,
      Y., Kensuke, N., Mikinari, S., Eiji, O., Seiichi Hata, Cobo Center, USA, (6/11/2014)

      The 81th Japan Laser Processing Society
    • Direct Reduction of Copper Oxide Nanoparticles Using Femtosecond Laser for Copper Patterning, Shun Arakane,Mizue Mizoshiri,Takuya Maetani,Mitsuhiro ShikidaSeiichi Hata,Osaka, (5/27/2014)

      ICOMM2014
    • Direct reduction and agglomeration of CuO nanoparticles for Cu micropatterning using femtosecond laser pulses, Mizue Mizoshiri,Shun Arakane,Takuya Maetani, Mitsuhiro ShikidaSeiichi Hata, Nanyang Technological University, Singapore (3/26/2014)

      MEMS2014
    • POLYMER MICROMACHINING BASED ON CU ON POLYIMIDE SUBSTRATE AND ITS APPLICATION TO FLEXIBLE MEMS SENSOR, Y. Niimi, S. Shibata, and M. Shikida, Hyatt Regency San Francisco, San Francisco, USA (1/27/2014)
  • Lectures
    • (Preparing)
  • Exhibitions
    • (No plan at the moment)

Awards, Press-Released Articles

  • Awards
    • (Preparing)
  • Press-Released Articles
    • (Preparing)

Others

  • Remaking the web pages powered by QHM based on PukiWiki. (1/7/1013)